PCD dresser for dressing CMP polyurethane pads
by M.Y. Tsai, J.C. Sung
International Journal of Abrasive Technology (IJAT), Vol. 3, No. 1, 2010

Abstract: This paper investigating a revolutionary design of pad conditioners is based on carving a structure out of sintered polycrystalline diamond (PCD) matrix. The PCD dresser is manufactured by wire electro discharge machining to form cutting pyramids of a specific size with a designed shape. The dressing characteristics of pad surface textures are studied by comparison with conventional diamond pad conditioner. Experimental results indicate that the PCD dresser can dress asperities of the pad more uniformly than the conventional diamond dresser due to PCD dresser having identically shaped tip and the same height diamond. In addition, the cutting rate of PCD dresser for IC1000 pad not only is reduced by about 30% and also it can dress pad more effectively than conventional diamond dresser.

Online publication date: Sat, 03-Apr-2010

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