Title: Control of interfacial properties in power electronic devices

Authors: Masakatsu Maeda; Yasuo Takahashi

Addresses: Joining and Welding Research Institute, Osaka University, 2-1 Yamadaoka, Suita, Osaka, 565-0871, Japan. ' Joining and Welding Research Institute, Osaka University, 2-1 Yamadaoka, Suita, Osaka, 565-0871, Japan

Abstract: The present paper describes processes to control structures and properties of two interfaces in the next-generation power electronic devices. The first is the interface between semiconductors and contact electrodes. Processes to synthesise Ohmic conducting interfaces for p-type SiC and n-type GaN developed by the authors are shown. Ti₃SiC₂ contact layer is formed on SiC by controlled interfacial reaction between SiC and Ti/Al bilayer using a stepwise heating scheme. On the other hand, it is shown that formation of Ti(C, N) contact layer on GaN can be enhanced by using TiC as a precursor for the interfacial reaction between GaN and Ti. The other interface is that between electrodes and wires. Heat resistant, ductile and highly electric conductive interfaces between Cu ribbons and Sn-coated Cu pads are formed by ultrasonic bonding.

Keywords: ohmic contact formation; p-type silicon carbide; n-type gallium nitride; ultrasonic bonding; highly reliable interfaces; copper bond interfaces; interface formation; interfacial properties; power electronics; nanotechnology.

DOI: 10.1504/IJNT.2013.050885

International Journal of Nanotechnology, 2013 Vol.10 No.1/2, pp.89 - 99

Published online: 07 Dec 2012 *

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