Int. J. of Nanomanufacturing   »   2012 Vol.8, No.1/2

 

 

Title: In-situ scanning white light interferometry employing dual-sensing configuration and active fringe-locking strategy

 

Authors: Liang-Chia Chen; Sheng-Lih Yeh; Abraham Mario Tapilouw; Kun-Feng Lee

 

Addresses:
Graduate Institute of Automation Technology, National Taipei University of Technology, Sec. 3, Chung-Hsiao E. Rd., Taipei, 106, Taiwan.
Department of Mechanical Engineering, Lunghwa University of Science and Technology, No. 300, Sec.1,Wanshou Rd., Guishan Shiang, Taoyuan County, 333, Taiwan.
Graduate Institute of Automation Technology, National Taipei University of Technology, Sec. 3, Chung-Hsiao E. Rd., Taipei, 106, Taiwan.
Graduate Institute of Automation Technology, National Taipei University of Technology, Sec. 3, Chung-Hsiao E. Rd., Taipei, 106, Taiwan

 

Abstract: This article presents new white light interferometry with vibration-resistant capability achieved by in-situ optical detection and closed-loop feedback strategies. Scanning white light interferometry (SWLI) has become a popular measurement method due to its long measurement range and high measurement accuracy. However, the drawback of in-situ interferometry lies mainly in unacceptable measurement errors caused by environmental disturbance such as mechanical vibration and acoustic noise. This paper describes a method employing dual-sensing configuration and active fringe-locking strategy to overcome the issue. A specially designed band-pass filter is employed to generate a high-coherent light field for real-time detecting vibratory displacement. As proven by the experimental results, the maximum measurement error caused by vibration can be effectively reduced by more than six folds.

 

Keywords: in-situ measurement; scanning white light interferometry; SWLI; vibration resistance; automatic optical inspection; AOI; fringe locking; dual sensing.

 

DOI: 10.1504/IJNM.2012.044654

 

Int. J. of Nanomanufacturing, 2012 Vol.8, No.1/2, pp.40 - 53

 

Available online: 01 Jan 2012

 

 

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