In-situ scanning white light interferometry employing dual-sensing configuration and active fringe-locking strategy Online publication date: Thu, 21-Aug-2014
by Liang-Chia Chen; Sheng-Lih Yeh; Abraham Mario Tapilouw; Kun-Feng Lee
International Journal of Nanomanufacturing (IJNM), Vol. 8, No. 1/2, 2012
Abstract: This article presents new white light interferometry with vibration-resistant capability achieved by in-situ optical detection and closed-loop feedback strategies. Scanning white light interferometry (SWLI) has become a popular measurement method due to its long measurement range and high measurement accuracy. However, the drawback of in-situ interferometry lies mainly in unacceptable measurement errors caused by environmental disturbance such as mechanical vibration and acoustic noise. This paper describes a method employing dual-sensing configuration and active fringe-locking strategy to overcome the issue. A specially designed band-pass filter is employed to generate a high-coherent light field for real-time detecting vibratory displacement. As proven by the experimental results, the maximum measurement error caused by vibration can be effectively reduced by more than six folds.
Existing subscribers:
Go to Inderscience Online Journals to access the Full Text of this article.
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Nanomanufacturing (IJNM):
Login with your Inderscience username and password:
Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.
If you still need assistance, please email subs@inderscience.com
Our Blog 
Follow us on Twitter 
Visit us on Facebook