Plasmonic interconnects for global wires in integrated circuits
by Soo-Jin Chua; Yan Liu; Lu Ding; Aaron Thean; Ting Mei; Christian A. Nijhuis
International Journal of Nanotechnology (IJNT), Vol. 17, No. 7/8/9/10, 2020

Abstract: Surface plasmon polaritons (SPPs) are bound electromagnetic waves propagating at a dielectric-metal interface, which have gained attention for high performance and ability for miniaturisation in high-speed dense circuits, due to their subwavelength properties. A dielectric-metal-dielectric (I-M-I) plasmonic waveguide with a 40 nm thick metal or metal-like strip on silicon substrate is proposed for intra-chip communication. The propagation characteristics of the I-M-I waveguide are investigated by numerical simulation and the modes are experimentally verified by scanning near-field optical microscopy. Metal lines as thin as 40 nm can have propagation lengths as large as 239 μm, which has small footprint compatible with the advanced interconnect process.

Online publication date: Fri, 20-Nov-2020

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