Elaboration and characterisation of Si(p)/PS/ZnO(i)/ZnO(n) structure obtained by rf-magnetron sputtering from aerogel nanopowder target material
by A. Alaya, Z. Ben Ayadi, K. Khirouni, L. El Mir, K. Djessas, S. Alaya
International Journal of Nanoparticles (IJNP), Vol. 2, No. 1/2/3/4/5/6, 2009

Abstract: Al-doped zinc oxide (AZO) thin films has been grown onto p type porous silicon (PS) substrate by rf-magnetron sputtering at room temperature using aluminium (3 at%) doped nanocrystalline powder synthesised by the sol-gel method. XRD measurements show that the obtained AZO film is polycrystalline with a hexagonal wurtzite structure, preferentially orientated in the (002) crystallographic direction. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to study the film morphology. The obtained AZO film has a typical columnar structure and very smooth surface.

Online publication date: Wed, 30-Sep-2009

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