Elaboration and characterisation of Si(p)/PS/ZnO(i)/ZnO(n) structure obtained by rf-magnetron sputtering from aerogel nanopowder target material Online publication date: Wed, 30-Sep-2009
by A. Alaya, Z. Ben Ayadi, K. Khirouni, L. El Mir, K. Djessas, S. Alaya
International Journal of Nanoparticles (IJNP), Vol. 2, No. 1/2/3/4/5/6, 2009
Abstract: Al-doped zinc oxide (AZO) thin films has been grown onto p type porous silicon (PS) substrate by rf-magnetron sputtering at room temperature using aluminium (3 at%) doped nanocrystalline powder synthesised by the sol-gel method. XRD measurements show that the obtained AZO film is polycrystalline with a hexagonal wurtzite structure, preferentially orientated in the (002) crystallographic direction. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to study the film morphology. The obtained AZO film has a typical columnar structure and very smooth surface.
Online publication date: Wed, 30-Sep-2009
If you are not a subscriber and you just want to read the full contents of this article, buy online access here.Complimentary Subscribers, Editors or Members of the Editorial Board of the International Journal of Nanoparticles (IJNP):
Login with your Inderscience username and password:
Want to subscribe?
A subscription gives you complete access to all articles in the current issue, as well as to all articles in the previous three years (where applicable). See our Orders page to subscribe.
If you still need assistance, please email firstname.lastname@example.org