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Investigation of dose and development time for thin e-beam resist poly(methyl methacrylate) for large area dense nanopattern applications
Oktay Göktaş; Dilek Çakıroğlu; Özal Yıldırım; Nebile Işık Göktaş
International Journal of Nanotechnology (IJNT), 2018 Vol.15 No.8/9/10, pp.663 - 668
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