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2 layers co-implanted with Ga and N ions">

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Composition and luminescence of Si and SiO2 layers co-implanted with Ga and N ions
D.S. Korolev; A.N. Mikhaylov; A.I. Belov; A.A. Konakov; V.K. Vasiliev; D.E. Nikolitchev; S.I. Surodin; D.I. Tetelbaum; Mahesh Kumar
International Journal of Nanotechnology (IJNT), 2017 Vol.14 No.7/8, pp.637 - 645
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