Title: Effect of ultraviolet/ozone treatment on the structural and electrical properties of solution-processed piezoelectric thick-film lead-zirconium-titanate

Authors: Phan Trong Tue; Reijiro Shimura; Kazuhiro Fukada; Keisuke Satou; Jinwang Li; Tatsuya Shimoda; Yuzuru Takamura

Addresses: School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan; Japan Science and Technology Agency (JST), CREST, Kawaguchi, Saitama 332-0012, Japan ' School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan; Japan Science and Technology Agency (JST), CREST, Kawaguchi, Saitama 332-0012, Japan ' Green Devices Research Center, Japan Advanced Institute of Science and Technology, 2-13 Asahidai, Nomi, Ishikawa 923-1292, Japan; Japan Science and Technology Agency (JST), CREST, Kawaguchi, Saitama 332-0012, Japan ' JSR Corporation, Yokkaichi-shi, Mie 510-8552, Japan ' Green Devices Research Center, Japan Advanced Institute of Science and Technology, 2-13 Asahidai, Nomi, Ishikawa 923-1292, Japan ' School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan; Green Devices Research Center, Japan Advanced Institute of Science and Technology, 2-13 Asahidai, Nomi, Ishikawa 923-1292, Japan ' School of Materials Science, Japan Advanced Institute of Science and Technology, 1-1 Asahidai, Nomi, Ishikawa 923-1292, Japan; Japan Science and Technology Agency (JST), CREST, Kawaguchi, Saitama 332-0012, Japan

Abstract: In this work, the impact of ultraviolet/ozone (UV/O₃) treatment on the structural and electrical properties of solution-processed thick-film lead-zirconium-titanate (PZT) was systematically investigated. Highly (111)-oriented PZT film was observed together with minor phases originated from (100) and (101) orientations. Improvements of electrical properties such as leakage current and hysteresis loop were obtained as well. It is believed that the UV/O₃ treatment could facilitate decomposition and oxidation processes of PZT film at a gel state, which leads to suppression of impurities (such as carbon and hydroxide) in the resultant film. As a result, a compacted and high-density PZT film could be achieved. The result enables the use of low-cost and environment-friendly solution-processed PZT film for various applications instead of using conventional high-cost vacuum-based process.

Keywords: lead-zirconium-titanate (PZT) film; solution process; UV/O₃ treatment; piezoelectric film.

DOI: 10.1504/IJNT.2018.089560

International Journal of Nanotechnology, 2018 Vol.15 No.1/2/3, pp.69 - 77

Published online: 30 Jan 2018 *

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