Title: Fluidic platform with embedded differential capacitively coupled contactless conductivity detector for micro-object sensing

Authors: Loc Quang Do; Tung Thanh Bui; Ha Thuy Thi Tran; Katsuya Kikuchi; Masahiro Aoyagi; Trinh Chu Duc

Addresses: Faculty of Physics, Radiophysics Department, Hanoi University of Science, Vietnam National University, 334, Nguyen Trai, Hanoi, Vietnam ' 3D Integration System Group, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 1, 1-1-1 Umezono, Tsukuba, Ibaraki, 305-8560, Japan; Faculty of Electronics and Telecommunication, MEMs and Microsystem Department, University of Engineering and Technology, Vietnam National University, Hanoi 144, Xuan Thuy, Cau Giay, Hanoi, Vietnam ' Faculty of Electronics Engineering, Posts and Telecommunications Institute of Technology, Km10, Nguyen Trai Rd., Ha Dong Dist., Hanoi, Vietnam ' 3D Integration System Group, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 1, 1-1-1 Umezono, Tsukuba, Ibaraki, 305-8560, Japan ' 3D Integration System Group, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba Central 1, 1-1-1 Umezono, Tsukuba, Ibaraki, 305-8560, Japan ' Faculty of Electronics and Telecommunication, MEMs and Microsystem Department, University of Engineering and Technology, Vietnam National University, Hanoi 144, Xuan Thuy, Cau Giay, Hanoi, Vietnam

Abstract: In this paper, we present a microfluidic platform with differential capacitively coupled contactless conductivity detection (DC4D) technique for microparticle detection. The microfluidic platform is formed by bonding PDMS channel to glass substrate. The proposed microfluidic sensor embedded in the microchannel consists of three adjacent electrodes. These electrodes are arranged to form differential coplanar capacitor structures to provide high sensitivity. The differential capacitance is changed when a microsized object crosses the sensing area in the microfluidic channel. This microfluidic system with the novel sensing design based on DC4D technique provides a platform for detection the presence of an object as well as its electrical property.

Keywords: microfluidic platform; cell detection; capacitive sensing.

DOI: 10.1504/IJNT.2018.089543

International Journal of Nanotechnology, 2018 Vol.15 No.1/2/3, pp.24 - 38

Available online: 12 Jan 2018 *

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