Title: PMMA and PMMA-Ag thin films deposited by a system combining inductively coupled plasma polymerisation and RF sputtering

Authors: S.T.C. Hsieh; J.H. Hsieh; Y. Li

Addresses: Materials Science and Engineering Program, University of California, Riverside, CA 92521, USA ' Center for Thin Films Technologies and Applications, Ming Chi University of Technology, New Taipei City, 24301, Taiwan; Department of Materials Engineering, Ming Chi University of Technology, New Taipei City, 24301, Taiwan ' Center for Thin Films Technologies and Applications, Ming Chi University of Technology, New Taipei City, 24301, Taiwan

Abstract: A plasma system, combining inductively coupled plasma (ICP) polymerisation and RF sputtering, was used to deposit poly(methyl methacrylate) (PMMA) thin films with or without embedding Ag nanoparticles (NPs), aiming at improved biocompatibility and anti-bacterial behaviours. Fourier transform infrared spectrometry (FTIR) was used to determine the vibrational modes of bonding in the deposited PMMA films. The films' cross-sectional morphologies were examined by FESEM. Ultraviolet-Visible (UV-Vis) photospectrometry was used to examine the optical properties. Eventually, the film structure and the embedment of Ag NPs were confirmed. The biocompatibility of the PMMA and PMMA/Ag films were shown to be desirable. Ag NPs did not show negative effect on the biocompatibility. In addition, the PMMA-Ag films show expected antibacterial behaviour.

Keywords: PMMA thin films; RF sputtering; plasma polymerisation; plasmonic behaviour; Ag nanoparticles.

DOI: 10.1504/IJNT.2017.087779

International Journal of Nanotechnology, 2017 Vol.14 No.12, pp.1020 - 1030

Published online: 23 Sep 2017 *

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