Authors: J.H. Hsieh; Y.J. Cho; C. Li
Addresses: Department of Materials Engineering, Ming Chi University of Technology, New Taipei City, 24301, Taiwan; Center for Thin Film Technologies and Applications, Ming Chi University of Technology, New Taipei City, 24301, Taiwan; Department of Electronic Engineering, Chang Gung University, Taoyuan, Taiwan ' Department of Materials Engineering, Ming Chi University of Technology, New Taipei City, 24301, Taiwan ' Department of Bio-medical Engineering, National Yang Ming University, Taipei, Taiwan
Abstract: It is known that the lifetime of Ti-based hard coatings is dependent on the oxidation rate of Ti. Ti(C,N,O) coatings prepared by an unbalanced magnetron sputtering process had been shown to have improved tribological properties. The present studies applied a static oxidation approach to explain that the oxidation activation energy could be correlated to wear rate. The properties of the oxidised films were analysed by Raman spectroscopy and scanning electron microscopy (SEM). In static oxidation, the formed titanium oxide (TiO2) layer was found to have mainly anatase structure at temperatures between 500°C to 600°C and transformed to rutile structure at temperature higher than 600°C. Through this study, oxidation rate and activation energy of oxidation for each sample were evaluated. It was found the samples exhibited a higher activation energy of oxidation could have a higher wear resistance. The role of oxidation mechanism was proved to be critical to the wear of Ti(C, N, O) thin films
Keywords: Ti(C; N; O) thin films; unbalance magnetron sputtering; oxidation; wear resistance.
International Journal of Nanotechnology, 2017 Vol.14 No.12, pp.1010 - 1019
Received: 08 May 2021
Accepted: 12 May 2021
Published online: 23 Sep 2017 *