Title: Development of high speed closed loop operation for single notch flexure-based nanopositioning system

Authors: T. Narendra Reddy; S.N. Vithun; Prakash Vinod; Shrikantha S. Rao; Mervin A. Herbert

Addresses: Nano Manufacturing Technology Centre (NMTC), Central Manufacturing Technology Institute (CMTI), Bangalore, 560022, India ' Nano Manufacturing Technology Centre (NMTC), Central Manufacturing Technology Institute (CMTI), Bangalore, 560022, India ' Nano Manufacturing Technology Centre (NMTC), Central Manufacturing Technology Institute (CMTI), Bangalore, 560022, India ' Mechanical Engineering Department, National Institute of Technology Karnataka (NITK) – Surathkal, Surathkal, 575025, India ' Mechanical Engineering Department, National Institute of Technology Karnataka (NITK) – Surathkal, Surathkal, 575025, India

Abstract: Nanotechnology is widely adapted in many industries for various applications such as manufacture of computer disks, semiconductor devices, medicine, biotechnology and so on. To manufacture such systems, nanopositioning stages are extremely critical as they deliver accuracies up to a few nanometres required in such ultra precise process. Nanopositioning stages are widely used as positioning systems in nanotechnology applications such as lithography, high-end microscopes, testing equipments, etc. The proposed work is aimed to design, fabrication and implementation of closed loop three directional flexure-based nanopositioning stage with improved positioning accuracies. The main challenge for designing a nanopositioning system is to minimise the non-linearities, cross-talk and hysteresis to achieve nanometric motions and to provide high bandwidth for scanning operation through closed loop operation. The static and dynamic testing results of nanopositioning stage shows that system can be used for high speed scanning applications.

Keywords: nanopositioning stage; flexure mechanism; nanotechnology; scanning probe microscope; piezo-actuators; capacitive sensors.

DOI: 10.1504/IJPTECH.2017.084549

International Journal of Precision Technology, 2017 Vol.7 No.1, pp.1 - 16

Received: 20 Jun 2016
Accepted: 29 Dec 2016
Published online: 13 Jun 2017 *

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