Title: Multi-axis MEMS force sensor for measuring friction components involved in dexterous micromanipulation: design and optimisation

Authors: Margot Billot; Xin Xu; Joël Agnus; Emmanuel Piat; Philippe Stempflé

Addresses: FEMTO-ST Institute, Univ. Bourgogne Franche-Comté, Univ. de Franche-Comté/CNRS/ENSMM/UTBM, 24 rue Savary, F-25000 Besançon, France ' FEMTO-ST Institute, Univ. Bourgogne Franche-Comté, Univ. de Franche-Comté/CNRS/ENSMM/UTBM, 24 rue Savary, F-25000 Besançon, France ' FEMTO-ST Institute, Univ. Bourgogne Franche-Comté, Univ. de Franche-Comté/CNRS/ENSMM/UTBM, 24 rue Savary, F-25000 Besançon, France ' FEMTO-ST Institute, Univ. Bourgogne Franche-Comté, Univ. de Franche-Comté/CNRS/ENSMM/UTBM, 24 rue Savary, F-25000 Besançon, France ' FEMTO-ST Institute, Univ. Bourgogne Franche-Comté, Univ. de Franche-Comté/CNRS/ENSMM/UTBM, 24 rue Savary, F-25000 Besançon, France

Abstract: At the nanoscale and for particular applications such as dexterous micro-manipulation, two degrees of freedom nanotribometers are no longer adequate for studying and characterising the contacts. This paper deals with the specifications and working principle of a new multi-axis friction sensor designed for nanotribological testing applied to this purpose in order to extract each contribution independently (i.e., sliding, rolling and spin motion). It is composed of a central platform with a fixed ball and surrounded by a compliant table. Its sensing ability is based on piezoresistivity: four sets of piezoresistors are symmetrically distributed at the root of four central beams. Finite elements method simulations are performed to find the optimal dimensions of the sensor. As results, this sensor could measure independently normal and friction forces in the range of 1 mN and 100 µN, respectively and the three rotation components. Estimated crosstalk is lower than 1% with a good sensitivity.

Keywords: MEMS force sensors; nanotribology; multi-axis force sensing; dexterous micromanipulation; friction; piezoresistive sensors; finite element method; FEM; simulation; optimisation; nanotechnology; sliding; rolling; spin motion.

DOI: 10.1504/IJNM.2015.071924

International Journal of Nanomanufacturing, 2015 Vol.11 No.3/4, pp.161 - 184

Received: 08 Apr 2015
Accepted: 05 Jun 2015

Published online: 23 Sep 2015 *

Full-text access for editors Access for subscribers Purchase this article Comment on this article