Title: Physical and mechanical properties of Ti/Al multilayer heat releasing coatings

Authors: Jindřich Musil; Petr Stupka; Šárka Zuzjaková; Radomír Čerstvý

Addresses: Department of Physics and New Technologies for Information Society (NTIS) – European Centre of Excellence, University of West Bohemia, Univerzitní 8, CZ-306 14 Plzeň, Czech Republic ' Department of Physics and New Technologies for Information Society (NTIS) – European Centre of Excellence, University of West Bohemia, Univerzitní 8, CZ-306 14 Plzeň, Czech Republic ' Department of Physics and New Technologies for Information Society (NTIS) – European Centre of Excellence, University of West Bohemia, Univerzitní 8, CZ-306 14 Plzeň, Czech Republic ' Department of Physics and New Technologies for Information Society (NTIS) – European Centre of Excellence, University of West Bohemia, Univerzitní 8, CZ-306 14 Plzeň, Czech Republic

Abstract: The paper reports on physical and mechanical properties of sputtered Ti/Al multilayer coatings with a bilayer thickness Λ ranging from 2 to 172 nm releasing heat during annealing. The temperature Thr at which the heat is released during reaction between Al and Ti atoms is investigated. It was found that: 1) Thr: a) decreases from ∼420 to 390°C for the coatings with Λ decreasing from 172 to 17 nm; b) ranges from ∼480 to ∼600°C for the coatings with Λ ≤ 12 nm; 2) the heat ΔHTi/Al evolved in the reaction increases from 5 to 35 kJ/mol with increasing Λ. Besides, it is shown that: 1) the heat can be released also during one pulse of the rapid thermal annealing up to 600°C with heating rate 100°C/s; 2) the released heat results in a strong interaction of the Ti/Al multilayer coating with Si substrate. The mechanical properties of the as-deposited Ti/Al multilayer coatings are also given.

Keywords: Ti/Al multilayer coatings; single layer TiAl alloy coatings; thermal annealing; heat release; mechanical properties; magnetron sputtering; silicon substrates; titanium; aluminium.

DOI: 10.1504/IJNM.2015.070525

International Journal of Nanomanufacturing, 2015 Vol.11 No.1/2, pp.78 - 93

Available online: 09 Jul 2015 *

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