Title: Thermal characterisation of high-aspect-ratio nanoheaters using IR thermography

Authors: Jun Hyung Lee; Young Hak Cho; Dong-Young Jang; Seok Kwan Hong; Jeong Jin Kang

Addresses: Department of Mechanical System Design Engineering, Seoul National University of Science and Technology, 232 Gongneung-ro, Nowon-gu, Seoul, 139-743, Republic of Korea ' Department of Mechanical System Design Engineering, Seoul National University of Science and Technology, 232 Gongneung-ro, Nowon-gu, Seoul, 139-743, Republic of Korea ' MSDE (Manufacturing Systems and Design Engineering) Program, Seoul National University of Science and Technology, 232 Gongneung-ro, Nowon-gu, Seoul, 139-743, Republic of Korea ' Molds and Dies Technology Group, Korea Institute of Industrial Technology (KITECH), 397, Seokcheon-ro, Ojeong-gu, Bucheon-si, Gyeonggi-do, Republic of Korea ' Molds and Dies Technology Group, Korea Institute of Industrial Technology (KITECH), 397, Seokcheon-ro, Ojeong-gu, Bucheon-si, Gyeonggi-do, Republic of Korea

Abstract: Recently, micro/nanoheater have been used and studied in various fields such as sensors. In particular, they have become important in biology and medicine. In this paper, we propose a novel measurement method which can indirectly measure the temperature distribution of a nanoheater's surface from side temperature measurements using infrared microscopes. Two different types of nanoheaters are fabricated and their thermal behaviours are analysed and characterised. They are fabricated in a top-down approach using silicon-on-insulator wafers and basic MEMS processes. Nanoheaters with a high-aspect-ratio are fabricated: a width of 200 nm, length of 100 µm and height of 30 µm. The nanoheater's surface is doped with boron by ion implantation for joule heating. Their thermal profile depending on their heat sink type was investigated. In conclusions, it is expected that a nanoheater with exact temperature control and thermally efficient structural design can be applied for bio-molecule manipulation.

Keywords: HAR nanoheaters; infrared thermography; high-aspect-ratio; temperature distribution measurement; thermal characterisation; IR thermography; heat sink type; biomolecule manipulation; nanotechnology.

DOI: 10.1504/IJNM.2014.066299

International Journal of Nanomanufacturing, 2014 Vol.10 No.5/6, pp.513 - 526

Received: 31 Jan 2014
Accepted: 16 Jul 2014
Published online: 20 Dec 2014 *

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