Title: Study on die polishing method of microstructured moulds applying low frequency vibration

Authors: Weimin Lin; Sze Keat Chee; Takeshi Yano; Hirofumi Suzuki; Toshiro Higuchi

Addresses: Gunma University, 29-1 Hon-cho, Ota, Gunma, 373-0057, Japan ' Mechano Transformer Corporation, 7-7, Shin-kawasaki, Saiwai-ku, Kawasaki, Kanagawa, 212-0032, Japan ' Mechano Transformer Corporation, 7-7, Shin-kawasaki, Saiwai-ku, Kawasaki, Kanagawa, 212-0032, Japan ' Chubu University, 1200, Matsumoto-cho, Kasugai, Aichi, 487-8501, Japan ' The University of Tokyo, 7-3-1, Hongo, Bunkyo-ku, Tokyo, 113-8656, Japan

Abstract: Demands of precision moulds with complicated microstructures for digital devices such as DVD pick-up system, and medical devices such as micro-TAS and solar optics, etc. are increasing. To enhance precision, the structured moulds must be polished after grinding or cutting in order to improve the surface roughness. In this paper, a two-dimensional low frequency vibration (LFV) polishing actuator using PZT is proposed and developed. The LFV consists of four mechanical amplitude magnified actuators, a multilayer stacked piezoelectric actuator (PZT) incorporated with mechanical transformer, and a centre piece. In the polishing experiments, HIPM workpieces were polished with WA slurry by the rotation and revolution type polishing method (RRP). The surface roughness of the work pieces and material removal amount (polished amount) was also evaluated. From the experimental results, it was found that the application of low frequency vibration is useful for realising higher precision in the polishing of microstructured moulds.

Keywords: low frequency vibration; LFV; microstructure; polished amount; polishing area; die polishing; microstructured moulds; precision moulds; surface roughness; surface quality; piezoelectric actuators; PZT; mechanical amplitude magnified actuators.

DOI: 10.1504/IJNM.2014.066280

International Journal of Nanomanufacturing, 2014 Vol.10 No.5/6, pp.424 - 431

Received: 08 Dec 2012
Accepted: 25 Oct 2013

Published online: 20 Dec 2014 *

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