Title: Rapid prototyping in microsystems technology

Authors: Joachim Heinzl, Robert Paspa

Addresses: Lehrstuhl fur Feingeratebau und Mikrotecknik, Institute of Mechatronic Technische Universitat Munchen, 85747 Garching, Boltzmannstrasse 15, Germany. ' Lehrstuhl fur Feingeratebau und Mikrotecknik, Institute of Mechatronic Technische Universitat Munchen, 85747 Garching, Boltzmannstrasse 15, Germany

Abstract: Rapid prototyping in micro systems technology helps to reduce time, costs and risk in the development of MEMS. At the early stages of the development of a new micro system in silicon, it is very helpful to produce prototypes. Computer simulation is difficult and takes time especially if moving parts, flowing fluids, bubbles or droplets are involved. The use of rapid prototyping technologies through laser ablation, micro-stereolithography and precision cutting allows the production of samples for testing, facilitating computer simulation as it can be verified step by step. Masking and etching processes are no longer necessary with the use of early prototypes.

Keywords: micro fluid systems; laser ablation; MEMS; silicon etching; drop ejection; rapid prototyping; microelectromechanical systems; microstereolithography; stereolithography; precision cutting; microsystems technology; MST; microengineering

DOI: 10.1504/IJPD.2004.005711

International Journal of Product Development, 2004 Vol.1 No.2, pp.155 - 164

Available online: 24 Nov 2004 *

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