Title: Nanomanufacturing processes: a critical review

Authors: George Chryssolouris, Panagiotis Stavropoulos, George Tsoukantas, Konstantinos Salonitis, Aristidis Stournaras

Addresses: Laboratory for Manufacturing Systems and Automation (LMS), Department of Mechanical Engineering and Aeronautics, University of Patras, Patras 26110, Greece. ' Laboratory for Manufacturing Systems and Automation (LMS), Department of Mechanical Engineering and Aeronautics, University of Patras, Patras 26110, Greece. ' Laboratory for Manufacturing Systems and Automation (LMS), Department of Mechanical Engineering and Aeronautics, University of Patras, Patras 26110, Greece. ' Laboratory for Manufacturing Systems and Automation (LMS), Department of Mechanical Engineering and Aeronautics, University of Patras, Patras 26110, Greece. ' Laboratory for Manufacturing Systems and Automation (LMS), Department of Mechanical Engineering and Aeronautics, University of Patras, Patras 26110, Greece

Abstract: Nanomanufacturing encompasses processes aimed at building nanoscale structures, devices and systems in one, two or three dimensions. Nanomanufacturing involves both bottom-up and top-down approaches. This paper reviews and discusses some critical issues of nanomanufacturing from the cost, production rate, quality and flexibility point of view.

Keywords: nanomanufacturing; nanotechnology; nanostructures; review.

DOI: 10.1504/IJMPT.2004.004946

International Journal of Materials and Product Technology, 2004 Vol.21 No.4, pp.331 - 348

Published online: 26 Jul 2004 *

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