Title: Three-dimensional micro- and nanostructuring with two-photon polymerisation

Authors: U. Stute, J. Serbin, C. Kulik, B.N. Chichkov

Addresses: Laser Zentrum Hannover e.V., Hollerithallee 8, D-30419 Hannover, Germany. ' Laser Zentrum Hannover e.V., Hollerithallee 8, D-30419 Hannover, Germany. ' Laser Zentrum Hannover e.V., Hollerithallee 8, D-30419 Hannover, Germany. ' Laser Zentrum Hannover e.V., Hollerithallee 8, D-30419 Hannover, Germany

Abstract: Two-photon polymerisation (2PP) of inorganic-organic hybrid polymers (ORMOCER1s) is demonstrated as a very promising approach for the fabrication of complex three-dimensional micro and nanostructures. Optical and mechanical properties of ORMOCER1 together with the 2PP-process open up new options for the design and packaging, e.g. of photonic devices. The 2PP-process employs ultrashort pulses which are focused into the volume of a photopolymer, being transparent at the laser wavelength. Solidification is performed in a highly localised volume due to the quadratic dependence of the two-photon absorption rate on the laser intensity. The polymerisation occurs along the 3D-trace of the focus allowing the fabrication of any computer generated 3D-structure by direct laser ||recording||. This technology can be used for rapid prototyping and low-cost fabrication of micro- and nanostructured components. Achieving spatial resolutions down to ~100 nm, even optical components can be produced and integrated to compact devices. This paper provides a discussion of two-photon polymerisation technique and examples of microfabrication.

Keywords: integration; microsystems; nanotechnology; packaging; two-photon polymerisation; nanostructures; rapid prototyping; microstructures.

DOI: 10.1504/IJMPT.2004.004942

International Journal of Materials and Product Technology, 2004 Vol.21 No.4, pp.273 - 284

Published online: 26 Jul 2004 *

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