Title: E-beam lithography processing of Au-nanowire contacts for development of gas sensors based on tungsten-oxide nanorods self-assembled on mica

Authors: Stanislav Haviar; Marcel Gillet; Iva Matolínová

Addresses: Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University in Prague, V Holešovičkách 2, 18000 Praha 8, Czech Republic ' Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University in Prague, V Holešovičkách 2, 18000 Praha 8, Czech Republic ' Department of Surface and Plasma Science, Faculty of Mathematics and Physics, Charles University in Prague, V Holešovičkách 2, 18000 Praha 8, Czech Republic

Abstract: This work describes the processing of Au nanowire arrays on insulating substrate developed to contact tungsten-oxide nanorods self-organised on the mica surface. The combination of electron beam lithography in scanning electron microscope and lift-off process is shown to be effective in fabricating nanocontact finger patterns with a line width of about 270 nm and 400 nm on bare and WO₃ nanorod covered mica surfaces, respectively, separated by a few micrometre distance. It is shown that at right selection of the distance between Au nanowires, the applied procedure makes possible to contact WO₃ nanorods of different length and density even if the nanostructures do not form an interconnected net. It opens the way for fabrication of single-wire nanosensors grown on insulating substrates.

Keywords: electron beam lithography; tungsten oxide nanowires; nanocontacts; nanotechnology; single-wire nanosensors; insulating substrates; gold nanowire arrays; gas sensors; nanorods; mica.

DOI: 10.1504/IJNT.2012.046755

International Journal of Nanotechnology, 2012 Vol.9 No.8/9, pp.825 - 835

Published online: 04 May 2012 *

Full-text access for editors Full-text access for subscribers Purchase this article Comment on this article