Title: Compensation for the effect of feedforward controller's switching on isolation table using flow meter

Authors: Habiburahman Shirani; Yukinori Nakamura; Shinji Wakui

Addresses: Department of Electronic and Information Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo, 184-8588, Japan. ' Department of Electronic and Information Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo, 184-8588, Japan. ' Department of Electronic and Information Engineering, Tokyo University of Agriculture and Technology, 2-24-16 Naka-cho, Koganei, Tokyo, 184-8588, Japan

Abstract: This paper considers a control scheme for the suppression of pneumatic isolation table's fluctuation induced by switching of the feedforward controller. The table acceleration and feedforward paths are added and the combined signal is sent to a damping integrator and gain. The damping integrator, besides generating a damping signal from acceleration signal, also avoids a large jump/drop of the feedforward signal during switching of the feedforward controller. Performance of this control scheme is evaluated by experiments while comparing with conventional control schemes. In addition, retuning of the feedforward compensator's gains is investigated. Based on the experimental results, it is shown that this control scheme can suppress both flow disturbances and switching of the feedforward controller.

Keywords: pneumatic isolation tables; switching; flow meters; feedforward compensators; flow disturbance; voice coil motor; VCM; feedforward control.

DOI: 10.1504/IJAMECHS.2012.045501

International Journal of Advanced Mechatronic Systems, 2012 Vol.4 No.1, pp.56 - 63

Available online: 17 Feb 2012 *

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