Title: Feasibility of simultaneous surface topography and XRF mapping using Shear Force Microscopy

Authors: M. Dehlinger; C. Dorczynski; C. Fauquet; F. Jandard; D. Tonneau; A. Bjeoumikhov; S. Bjeoumikhova; R. Gubzhokov; A. Erko; I. Zizak; D. Pailharey; S. Ferrero; B. Dahmani

Addresses: CINaM-CNRS, Aix-Marseille Université, Campus de Luminy – Case 913-13288, Marseille, France. ' CINaM-CNRS, Aix-Marseille Université, Campus de Luminy – Case 913-13288, Marseille, France. ' CINaM-CNRS, Aix-Marseille Université, Campus de Luminy – Case 913-13288, Marseille, France. ' CINaM-CNRS, Aix-Marseille Université, Campus de Luminy – Case 913-13288, Marseille, France. ' CINaM-CNRS, Aix-Marseille Université, Campus de Luminy – Case 913-13288, Marseille, France. ' IFG GmbH, 29/31, Rudower-chaussee, 12489 Berlin, Germany. ' IFG GmbH, 29/31, Rudower-chaussee, 12489 Berlin, Germany. ' IFG GmbH, 29/31, Rudower-chaussee, 12489 Berlin, Germany. ' HZB-BESSY, Institute Nanometre Optics and Technology, Albert Einstein Strasse, 15, 12489 Berlin, Germany. ' HZB-BESSY, Institute Nanometre Optics and Technology, Albert Einstein Strasse, 15, 12489 Berlin, Germany. ' Cie AXESS TECH, 750 Chemin de Beaupré, 13760, Saint Cannat, France. ' Cie AXESS TECH, 750 Chemin de Beaupré, 13760, Saint Cannat, France. ' Cie LovaLite, 18 Rue A.Savary, 25000 Besançon, France

Abstract: Marketed sources equipped with polycapillary optics allow now laboratory X-Ray Fluorescence (XRF) analysis with 5-10 µm lateral resolution. To improve it, we had the idea to use a thin cylindrical X-ray capillary fitted to the XRF detector. The combination with near-field microscopy would then lead to a simultaneous record of both topography and XRF from a sample at µm lateral resolution. For this purpose, we have built a home-made Shear Force Microscope to carry out this experiment in the future.In a first step, we have validated the microscope, operating in SNOM configuration, using test sample consisting in ZnO clusters deposited on a Si₃N₄ grating. Second, the feasibility of XRF collection through a thin X-ray cylindrical capillary on Co/Ti sample is shown in this work. The results suggest that sub-1 µm in-lab XRF analysis is possible, replacing the optical fibre of our SNOM apparatus by an X-ray capillary. On the basis of modelling our results, we then further discuss the possibility to reach 100 nm XRF resolution, combined to surface topography, working in synchrotron environment.

Keywords: x-ray spectroscopy; characterisation tools; nanocharacterisation; nanotechnology; surface topography; XRF mapping; ZnO clusters; zinc oxide; silicon nitride; x-ray fluorescence; x-ray capillary; modelling.

DOI: 10.1504/IJNT.2012.045348

International Journal of Nanotechnology, 2012 Vol.9 No.3/4/5/6/7, pp.460 - 470

Published online: 06 Feb 2012 *

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