Title: Anodic 3D nanostructuring for tailored applications

Authors: Eric Moyen; Lionel Santinacci; Laurence Masson; Houda Sahaf; Magali Macé; Loïc Assaud; Margrit Hanbücken

Addresses: CINaM-CNRS, Aix-Marseille University, Campus Luminy – Case 913 – 13288 Marseille, France. ' CINaM-CNRS, Aix-Marseille University, Campus Luminy – Case 913 – 13288 Marseille, France. ' CINaM-CNRS, Aix-Marseille University, Campus Luminy – Case 913 – 13288 Marseille, France. ' CINaM-CNRS, Aix-Marseille University, Campus Luminy – Case 913 – 13288 Marseille, France. ' CINaM-CNRS, Aix-Marseille University, Campus Luminy – Case 913 – 13288 Marseille, France. ' CINaM-CNRS, Aix-Marseille University, Campus Luminy – Case 913 – 13288 Marseille, France. ' CINaM-CNRS, Aix-Marseille University, Campus Luminy – Case 913 – 13288 Marseille, France

Abstract: Electrochemistry can be used to fabricate different three dimensional objects on the nanometre scale. Porous anodic aluminium oxide (AAO) membranes with varying but controlled morphologies are used in several complementary experiments in physics and biology. The present paper gives a description of the membrane fabrication procedure and presents a selection of applications based on the use of the membranes as evaporation masks in crystal growth experiments, as masks in reactive ion etching experiments or as moulds to fabricate arrays of ordered polymer nanopillars. Applications in energy storage are also briefly mentioned. Finally the fabrication of TiO2 nanotubes (TNT) is described. Their anodic formation is very close to that of the AAO membranes and TNTs offer additional perspectives for applications.

Keywords: nanoporosity; nanoarrays; nanopatterning; nanostructures; TiO nanotubes; self-assembly; templates; chemical functionalisation; nanoreservoirs; electrochemistry; nanotechnology; porous AAO; anodic aluminium oxide; AAO membranes; evaporation masks; polymer nanopillars; titanium oxide.

DOI: 10.1504/IJNT.2012.045330

International Journal of Nanotechnology, 2012 Vol.9 No.3/4/5/6/7, pp.246 - 259

Received: 08 May 2021
Accepted: 12 May 2021

Published online: 02 Feb 2012 *

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