Title: The system and the mechatronics of a pagoda type micro-CMM

Authors: Kuang-Chao Fan; Fang Cheng; Hung-Yu Wang; Jyun-Kuan Ye

Addresses: Department of Mechanical Engineering, National Taiwan University, 1 Sec. 4, Roosevelt Rd., Taipei 10617, Taiwan; School of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, 193 Tunxi Rd., Hefei 230009, China. ' School of Instrument Science and Optoelectronic Engineering, Hefei University of Technology, 193 Tunxi Rd., Hefei 230009, China; School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue 639798, Singapore. ' Department of Mechanical Engineering, National Taiwan University, 1 Sec. 4, Roosevelt Rd., Taipei 10617, Taiwan. ' Department of Mechanical Engineering, National Taiwan University, 1 Sec. 4, Roosevelt Rd., Taipei 10617, Taiwan

Abstract: This paper presents design considerations of a precision micro-CMM system and its mechatronic modules. The basic design concept is to meet the requirements of high stiffness, force balance, thermal balance, Abbe principle, metrology frame and vibration-free. Based on these criteria, a novel bridge of pagoda shape is designed and analysed by optimisation to verify its superior stiffness with force balance and thermal balance structure due to its symmetrical geometry. A high precision Z-ram design with co-axial counterweight and vibration suppression is presented. The design of a novel symmetrical coplanar XY-stage that observes the Abbe principle is explained. This micro-CMM has a measurement range of X: 20 mm, Y: 20 mm and Z: 10 mm. Driven by a commercial ultrasonic motor and fed back by a designed diffraction interference scale, each axis can achieve long stroke and nano-positioning motion. Adding a designed contact scanning measuring probe to the spindle, this system is able to measure any geometry of a part to nanometre resolution.

Keywords: micro-CMMs; pagoda bridge; co-planar stage; Abbe principle; contact probes; coordinate measuring machines; micromachines; stiffness; force balance; thermal balance; Abbe principle; metrology frame; vibration free; nanometre resolution; nanotechnology.

DOI: 10.1504/IJNM.2012.044656

International Journal of Nanomanufacturing, 2012 Vol.8 No.1/2, pp.67 - 86

Available online: 01 Jan 2012 *

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