Title: Topography simulation and vibration analysis of ultra-precision diamond flycutting micro V-groove

Authors: Yong Liu; Ziqiang Yin; Shengyi Li; Yulie Wu; Yifan Dai

Addresses: Department of Mechatronics Engineering, National University of Defense Technology, Changsha, Hunan 410073, China. ' Department of Mechatronics Engineering, National University of Defense Technology, Changsha, Hunan 410073, China. ' Department of Mechatronics Engineering, National University of Defense Technology, Changsha, Hunan 410073, China. ' Department of Mechatronics Engineering, National University of Defense Technology, Changsha, Hunan 410073, China. ' Department of Mechatronics Engineering, National University of Defense Technology, Changsha, Hunan 410073, China

Abstract: Ultra-precision diamond flycutting is an important method to manufacture micro V-groove with sub-micrometer form accuracy. The relative vibration between the tool and the work piece is one of the most critical factors which determine the manufacturing precision during the flycutting process. In order to restrain the vibration influence, a vibration analysing method in flycutting process is presented. The dynamical model of micro V-groove is established according to the character of ultra-precision diamond flycutting. Three-dimensional topography is simulated with and without vibration. The V-groove surface roughness is analysed based on the spatial frequency spectrum. Ultra-precision flycutting experiments are carried out, and the V-groove surface roughness is measured by the stylus profilometer along the V-groove. The vibration is identified on the basis of spectrum analysis results. The vibration character of flycutting system is obtained, and the cutting parameters are optimised.

Keywords: diamond flycutting; spatial frequency spectrum; vibration analysis; V-grooves; stylus profilometer; nanomanufacturing; topography simulation; nanotechnology; microgrooves; ultraprecision machining; dynamic modelling; surface roughness; surface quality.

DOI: 10.1504/IJNM.2011.043687

International Journal of Nanomanufacturing, 2011 Vol.7 No.5/6, pp.488 - 499

Available online: 11 Nov 2011

Full-text access for editors Access for subscribers Purchase this article Comment on this article