Title: Study on the ductile mode cutting of LiNbO₃ wafer for fabrication of SAW device

Authors: Hiroo Shizuka; Koichi Okuda; Masayuki Nunobiki; Wei Li; Takanobu Inaoka

Addresses: Graduate School of Engineering, University of Hyogo, Shosha 2167, Himeji, Hyogo, Japan. ' Graduate School of Engineering, University of Hyogo, Shosha 2167, Himeji, Hyogo, Japan. ' Graduate School of Engineering, University of Hyogo, Shosha 2167, Himeji, Hyogo, Japan. ' Graduate School of Engineering, University of Hyogo, Shosha 2167, Himeji, Hyogo, Japan. ' Department of Mechanical and Systems Engineering, University of Hyogo, Shosha 2167, Himeji, Hyogo, Japan

Abstract: This paper describes the cutting characteristics of lithium niobate, which is used for surface acoustic wave type micro pumps, regarding the formation of micro grooves by direct cutting. Since lithium niobate is a brittle material with a strong crystal orientation dependency, significant differences were observed in the characteristics of the finished surface according to different directions of cutting. The ductile mode cutting of lithium niobate was found to be feasible with cutting depths of approximately 5 ?m or less. Also, results of the study show the feasibility of the formation of minute grooves through the cutting of lithium niobate, using milling with an end mill.

Keywords: diamond cutting; single crystal diamond; lithium niobate; LiNbO3; surface acoustic wave; ductile mode; micro pumps; micro grooves; end milling.

DOI: 10.1504/IJAT.2011.042827

International Journal of Abrasive Technology, 2011 Vol.4 No.3, pp.191 - 203

Received: 02 May 2011
Accepted: 10 Jun 2011
Published online: 30 Sep 2014 *

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