Title: Experiences in implementing simulation-based support for operational decision making in semiconductor manufacturing

Authors: Ching-Hua Chen-Ritzo, Sugato Bagchi, Lindsay E. Burns, Steven C. Catlett

Addresses: Business Analytics and Mathematical Sciences, IBM T.J. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598, USA. ' Business Analytics and Mathematical Sciences, IBM T.J. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598, USA. ' 300mm FAB OPs Engineering, IBM Systems & Technology Group, Semiconductor Solutions, 2070 Route 52, Mail Stop 34B, Hopewell Junction, NY 12533, USA. ' 300mm FAB OPs Engineering, IBM Systems & Technology Group, Semiconductor Solutions, 2070 Route 52, Mail Stop 34B, Hopewell Junction, NY 12533, USA

Abstract: We describe a discrete event simulator that has been deployed in a 300 mm wafer fabrication plant to aid short-term, operational decision-making. Our simulator has been designed and calibrated to produce reliable predictions over simulation horizons as short as a few days to several weeks. It has been automated to run daily, without the need for manually provided data. We provide motivating examples illustrating the need for short-term predictions, and share insights on aspects of the simulator design that contribute to its usefulness and accuracy. Finally, we include several examples of how the simulator has been used to aid operational and tactical decision-making at the IBM wafer fabrication plant in East Fishkill, NY. [Received: 01 June 2009; Revised: 16 November 2009; Accepted: 01 February 2010].

Keywords: semiconductor manufacturing; discrete-event simulation; production control; operational decision making; wafer fabrication.

DOI: 10.1504/EJIE.2011.041617

European Journal of Industrial Engineering, 2011 Vol.5 No.3, pp.272 - 291

Available online: 28 Jul 2011 *

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