Title: Modelling and analysis of semiconductor manufacturing in a shrinking world: challenges and successes

Authors: Chen-Fu Chien, Stephane Dauzere-Peres, Hans Ehm, John W. Fowler, Zhibin Jiang, Shekar Krishnaswamy, Tae-Eog Lee, Lars Monch, Reha Uzsoy

Addresses: Industrial Engineering Division, TSMC, Hsinchu, 30077, Taiwan. ' Department of Manufacturing Sciences and Logistics, Ecole des Mines de Saint-Etienne, 13541 Gardanne, France. ' Supply Chain Management, Infineon Technologies AG, 81726 Munich, Germany. ' School of Computing, Informatics and Decision Systems Engineering, Industrial Engineering Faculty, Arizona State University, Tempe, AZ, 85287, USA. ' Department of Industrial Engineering & Logistics, Shanghai Jiao Tong University, Shanghai, 200240, China. ' formerly Advanced Micro Devices, USA. ' Department of Industrial and System Engineering, KAIST, 373-1 Guseong-dong, Yuseong-gu, Daejeon, South Korea. ' Department of Mathematics and Computer Science, Chair of Enterprise-wide Software Systems, University of Hagen, 58097 Hagen, Germany. ' Department of Industrial and Systems Engineering, North Carolina State University, Raleigh, NC 27695, USA

Abstract: This paper presents a brief overview of semiconductor manufacturing followed by the results of a panel session held at the Fourth International Conference on Modeling and Analysis of Semiconductor Manufacturing (MASM) in Miami, December 10, 2008 on the role of modelling and analysis in semiconductor manufacturing in a shrinking world. Three participants are from Asia, two from Europe, and two from the USA in addition to the two panel organisers (Fowler and Mönch). At least one panellist from each continent is from industry and one from academia. The statements of the panellists from industry relate to modelling and analysis problems found in their own companies. Those of the academic panellists describe the role that modelling and analysis has played and is expected to play in their semiconductor manufacturing research. Their views on the challenges and successes of modelling and analysis in a globalised world are also included. Finally, we identify some future research challenges for semiconductor manufacturing. [Received: 01 March 2010; Revised: 16 April 2010; Accepted: 01 May 2010]

Keywords: semiconductor manufacturing; production planning; production control; supply chain management; SCM; modelling; panel discussion; future research directions.

DOI: 10.1504/EJIE.2011.041616

European Journal of Industrial Engineering, 2011 Vol.5 No.3, pp.254 - 271

Available online: 28 Jul 2011 *

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