Title: Material aspects for the diamond machining of submicron optical structures for UV-application

Authors: Ekkard Brinksmeier, Oltmann Riemer, Ralf Glabe, Axel Meier

Addresses: Laboratory for Precision Machining LFM, Badgasteiner Str. 2, 28359 Bremen, Germany. ' Laboratory for Precision Machining LFM, Badgasteiner Str. 2, 28359 Bremen, Germany. ' Laboratory for Precision Machining LFM, Badgasteiner Str. 2, 28359 Bremen, Germany. ' Laboratory for Precision Machining LFM, Badgasteiner Str. 2, 28359 Bremen, Germany

Abstract: The paper discusses material aspects governing the diamond machining process for submicron structures which serve as diffractive optical elements (DOE). Therefore, first the cutting process for fabrication of DOEs is introduced. The microstructured surface is generated by diamond turning using a nano Fast Tool Servo (nFTS), which enables a variation of the depth of cut up to 350 nm at a maximum frequency of 10 kHz. Such DOEs are typically used with a wavelength of 632 nm. A new application for UV-radiation with a wavelength below 350 nm requires alternative materials with sufficient reflectivity. Cutting experiments and UV-reflectivity tests were performed in order to identify suitable materials. High machining accuracy and UV-reflectivity were achieved with ultrafine grained aluminium as workpiece material.

Keywords: diamond machining; submicron optical structures; microstructure; UV-application; UV-reflectivity; nanomanufacturing; nano fast tool servo; nFTS; nanotechnology; diffractive optical elements; diamond turning; ultrafine grained aluminium.

DOI: 10.1504/IJNM.2011.039963

International Journal of Nanomanufacturing, 2011 Vol.7 No.1, pp.63 - 72

Received: 12 Oct 2010
Accepted: 19 Jan 2011
Published online: 28 Feb 2015 *

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