Title: Numerical investigation on the thermal conductive characteristics of the TiO₂/ZnO bilayer films

Authors: Yongsheng Wu, Ping Yang, Haifeng Xu, Xianxin Xu

Addresses: Laboratory of Advanced Design, Manufacturing and Reliability for MEMS/NEMS/ODES, School of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China. ' Laboratory of Advanced Design, Manufacturing and Reliability for MEMS/NEMS/ODES, School of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China. ' Laboratory of Advanced Design, Manufacturing and Reliability for MEMS/NEMS/ODES, School of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China. ' Laboratory of Advanced Design, Manufacturing and Reliability for MEMS/NEMS/ODES, School of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China

Abstract: The aim of this article is to provide a numerical approach to perform thermal conductive design or evaluation for TiO₂/ZnO bilayer films. Based on the investigation of the structure characteristics of TiO₂/ZnO bilayer films, the key performance about the thermal conductive characteristics of the TiO₂/ZnO bilayer films is analysed by using equilibrium molecular dynamics (EMD) and Buckingham potential function. The results show that the temperature and the thickness of the film have a great impact on the thermal conductive characteristics of the TiO₂/ZnO bilayer films. The simulation builds a basis for future investigation about thermal design of TiO₂/ZnO for micro-nano manufacturing.

Keywords: thermal conductivity; molecular dynamics; simulation; interface; TiO2; titanium dioxide; zinc oxide; ZnO; bilayer films; film temperature; film thickness; nanomanufacturing; micromanufacturing; thermal design; nanotechnology.

DOI: 10.1504/IJMSI.2011.039044

International Journal of Materials and Structural Integrity, 2011 Vol.5 No.1, pp.26 - 35

Published online: 27 Nov 2014 *

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