Title: Plasmathermal synthesis of ceramic powders

Authors: Janos Szepvolgyi, Ilona Toth, Tamas Szekely, Geza Szentgyorgyi

Addresses: Research Laboratory for Inorganic Chemistry, Hungarian Academy of Sciences, Budaorsi ut 45, H-1112 Budapest, Hungary. ' Research Laboratory for Inorganic Chemistry, Hungarian Academy of Sciences, Budaorsi ut 45, H-1112 Budapest, Hungary. ' HUNGALU Engineering and Development Centre, Pozsonyi ut 56, H-1133 Budapest, Hungary. ' HUNGALU Engineering and Development Centre, Pozsonyi ut 56, H-1133 Budapest, Hungary

Abstract: Synthesis of ultrafine silicon nitride and titanium dioxide powders was investigated in an inductively coupled laboratory scale plasma reactor operating with high purity argon as plasma gas and argon, nitrogen or oxygen as sheath gases. Appropriate chlorides, ammonia and oxygen have been used as reagents. The R.F. generator operated ar 27.17 MHz with an output power of 2 to 6 kW. Products were characterised by making use of AAS, ICP, TG, DTA, SEM, BET, XPS and XRD techniques. Effects of the operating parameters, particularly the output power and feed rates of the reagents on the properties and yields of products have been studied in detail.

Keywords: R.F. plasma; ceramic powders; ultrafine powders; silicon nitride; synthesis; titanium dioxide; output power; feed rates; reagents.

DOI: 10.1504/IJMPT.1995.036481

International Journal of Materials and Product Technology, 1995 Vol.10 No.3/4/5/6, pp.578 - 586

Published online: 03 Nov 2010 *

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