Title: Tailored nanostructures for microgassensors by flame spray pyrolysis

Authors: Antonio Tricoli, Sotiris E. Pratsinis

Addresses: Particle Technology Laboratory, Department of Mechanical and Process Engineering, ETH Zurich, CH-9082 Zurich, Switzerland. ' Particle Technology Laboratory, Department of Mechanical and Process Engineering, ETH Zurich, CH-9082 Zurich, Switzerland

Abstract: Integration of nanoparticle synthesis and deposition in micro-machining processes is a mandatory step toward development of nanodevices. Indeed, large scale production of tailored particles is achievable in aerosol reactors. Direct deposition from the aerosol leads to formation of nanostructured layers avoiding the cumbersome steps of wet-methods. Nevertheless, improvement of nanoparticle cohesion and adhesion by isothermal sintering results in deterioration of the device performance due to crystal and grain growth. Furthermore, sufficient stabilisation is not always possible at substrate compatible temperatures. Here, we describe the synthesis and deposition of SnO₂, TiO₂ and SnO₂-SiO₂ nanostructured layers that can be utilised for micro-machined gas sensors.

Keywords: micro gas sensors; ethanol; nanomanufacturing; film; nanostructures; direct deposition; stability; in-situ annealing; nanotechnology; nanoparticles; micromachining; nanoparticle deposition; nanoparticle synthesis; SnO2; tin dioxide; TiO2; titanium dioxide; titania; SiO2; silicon dioxide; silica; flame spray pyrolysis.

DOI: 10.1504/IJNM.2010.034778

International Journal of Nanomanufacturing, 2010 Vol.6 No.1/2/3/4, pp.125 - 136

Published online: 22 Aug 2010 *

Full-text access for editors Full-text access for subscribers Purchase this article Comment on this article