Title: Metallic mould inserts for fabrication of polymer microfluidic devices

Authors: S.B. Tor, G. Fu, N.H. Loh, B.Y. Tay, D.E. Hardt

Addresses: Singapore-MIT Alliance (SMA), N3.2-01-36, 65 Nanyang Drive, 637460 Singapore; School of Mechanical & Aerospace Engineering, Nanyang Technological University, 639798, Singapore. ' Singapore-MIT Alliance (SMA), N3.2-01-36, 65 Nanyang Drive, 637460, Singapore ' School of Mechanical & Aerospace Engineering, Nanyang Technological University, 639798, Singapore. ' Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, 638075, Singapore. ' Singapore-MIT Alliance (SMA), Room 8-407, 77 Massachusetts Avenue, Cambridge, MA 02139, USA; Department of Mechanical Engineering, Massachusetts Institute of Technology, Room 35-231, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA

Abstract: In this paper, three metallic mould inserts for fabrication of polymer microfluidic devices were produced using different methods. Firstly, metallic glass mould insert was cut by high speed micro-milling. Secondly, 316L stainless steel mould insert was made by micro metal injection moulding (μMIM) using D50 = 4 μm powder. Finally, 316L stainless steel powder with a smaller particle size of D50 = 2 μm was used to produce mould insert in order to improve surface quality of the mould insert. The geometry and surface roughness of micro-features on the three mould inserts are viewed and compared.

Keywords: nanomanufacturing; mould inserts; micromilling; micro metal injection moulding; μMIM; MIM; nanotechnology; micromachining; polymer microfluidic devices; microfluidics; stainless steel; surface quality.

DOI: 10.1504/IJNM.2010.034773

International Journal of Nanomanufacturing, 2010 Vol.6 No.1/2/3/4, pp.66 - 74

Published online: 22 Aug 2010 *

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