Title: Research of reliability for measuring high-g micro array acceleration sensor

Authors: Liu Xiaoming, Xie Mengji, Zhu Zhonggan, Wu Jianshu, Cao Shijian

Addresses: University of Electronic Science and Technology of China, Chengdu 610054, China. ' University of Electronic Science and Technology of China, Chengdu 610054, China. ' University of Electronic Science and Technology of China, Chengdu 610054, China. ' University of Electronic Science and Technology of China, Chengdu 610054, China. ' University of Electronic Science and Technology of China, Chengdu 610054, China

Abstract: High-g is an acceleration value larger than 105 g. For the requirements of detecting high-g, people pay more and more attention to the reliability of an accelerometer. In this paper, the design and manufacture of high-g micro array acceleration sensor are researched to improve the reliability of the accelerometer. Owing to the superiority of MEMS manufacturing, in one processing, multiple micro-acceleration sensors with the same function can be integrated in one chip. According to the method of the array layout of multiple micro-acceleration sensors on a two-dimensional plane, the layout is ascertained by using multiple non-linear regression and orthogonal experimental design. Multiple micro-acceleration sensors lay reasonably to improve the reliability of the high-g micro array acceleration sensor. The linked line of sensor system, which is manufactured according to these parameters, remains intact by the impact of 1.22 × 105 g. Owing to the optimised design and manufacture, the reliability of the acceleration is increased to 0.9906, which meets the requirements of the application.

Keywords: MEMS; microsensors; high-g microarray acceleration; accelerometer reliability; sensor design; sensor manufacture; microelectromechanical systems; acceleration sensors.

DOI: 10.1504/IJCAT.2010.034734

International Journal of Computer Applications in Technology, 2010 Vol.39 No.1/2/3, pp.79 - 85

Published online: 18 Aug 2010 *

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