Title: Preparation and test on mechanical characteristics of W/Al bilayer films

Authors: Shuaihua Shang, Chun Li, Ping Yang

Addresses: Laboratory of Advanced Design, Manufacturing & Reliability for MEMS/NEMS/ODES, School of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, P.R. China. ' Laboratory of Advanced Design, Manufacturing & Reliability for MEMS/NEMS/ODES, School of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, P.R. China. ' Laboratory of Advanced Design, Manufacturing & Reliability for MEMS/NEMS/ODES, School of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, P.R. China

Abstract: A W/Al double-layer metal film sample has been prepared by the magnetron sputtering method on glass substrates. The membrane-substrate system sample was measured by using nano-indentation test for investigating the mechanical characteristics. Based on the analysis of the data from the indentation experiments, the elastic modulus, hardness of the system and other mechanical properties as well as the mechanical parameters were investigated. The results lay an experimental basis for future work.

Keywords: W-Al double-layer metal films; tungsten; aluminium; magnetron sputtering deposition; nanoindentation; mechanical properties; nanotechnology; elastic modulus; hardness.

DOI: 10.1504/IJMSI.2009.029335

International Journal of Materials and Structural Integrity, 2009 Vol.3 No.4, pp.261 - 268

Published online: 22 Nov 2009 *

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