Title: Thin-film tin oxide–ethanol sensor

Authors: H.J. Pandya

Addresses: Department of Electronics and Communication Engineering, Invertis Institute of Engineering and Technology, Invertis Village, Bareilly-Lucknow Highway – 24, Bareilly 243 123, UP, India

Abstract: Tin Oxide (SnO₂) thin films grown on glass substrate at 648 K using direct evaporation method with two gold pads deposited on the top for electrical contacts were exposed to ethanol vapours (200-1000 ppm). The operating temperature of the sensor was optimised. The sensitivity variation of films having different thicknesses was studied. To improve the sensitivity and selectivity further, a thin layer of metal oxide was deposited on the sensor surface to work as a catalytic layer and its effect on the performance of the sensor was studied. The response and recovery times of the sensor were determined.

Keywords: semiconductor gas sensors; ethanol; catalytic layer; tin oxide thin films; SnO2; film thickness; sensitivity; selectivity.

DOI: 10.1504/IJSISE.2009.029323

International Journal of Signal and Imaging Systems Engineering, 2009 Vol.2 No.1/2, pp.3 - 6

Published online: 19 Nov 2009 *

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