Authors: Qionglin Yan, Hong Lei
Addresses: Research Center of Nano-science and Nano-technology, Shanghai University, Shanghai 200444, China. ' Research Center of Nano-science and Nano-technology, Shanghai University, Shanghai 200444, China
Abstract: Abrasive particles are the key elements of chemical-mechanical polishing (CMP) slurry. α-alumina abrasive, commonly used in CMP slurry, often causes scratches in the polished surface because of its agglomeration and high hardness. In this paper, a kind of novel α-alumina/ferric oxide core-shell type abrasive was prepared by coating a film of ferric oxide on the surface of α-Al2O3 particles with a chemical coprecipitation method. The α-alumina/ferric oxide composite particles were characterised by time-of-flight secondary ion mass spectroscopy (TOF-SIMS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) and laser particle size analyser. The results show that Fe2O3 has been successfully coated on the surface of α-alumina particles and the dispersibility of the composite particles is better than that of pure α-Al2O3 particles.
Keywords: chemical-mechanical polishing; CMP slurry; aluminium oxide; alumina; ferric oxide; iron oxide; alpha-Al2O3/Fe2O3 composite abrasive; coatings; nanocomposites; nanotechnology; polished surfaces; scratching.
International Journal of Abrasive Technology, 2009 Vol.2 No.4, pp.393 - 399
Available online: 03 Nov 2009 *Full-text access for editors Access for subscribers Purchase this article Comment on this article