Title: Characterisation of mechanical and wear properties of NiAl and Ni-Al-N thin films deposited by closed field unbalanced magnetron sputter ion plating

Authors: R. Said, N. Ali, W. Ahmed, Ian Sherrington, M. Abdalaziz, M.J. Jackson

Addresses: School of Computing, Engineering and Physical Sciences, University of Central Lancashire, Preston PR1 2HE, UK. ' School of Computing, Engineering and Physical Sciences, University of Central Lancashire, Preston PR1 2HE, UK. ' School of Computing, Engineering and Physical Sciences, University of Central Lancashire, Preston PR1 2HE, UK. ' School of Computing, Engineering and Physical Sciences, University of Central Lancashire, Preston PR1 2HE, UK. ' Faculty of Science, University of Alfateh, Tripoli, Libya. ' MET, College of Technology, Purdue University, West Lafayette, IN 47907, USA

Abstract: NiAl and Ni-Al-N thin films with a thickness of approximately 1 μm have been deposited onto glass and stainless steel 316 substrates using closed field unbalanced magnetron sputter ion platting process. A CSM scratch tester was used to determine the critical load, the coefficient of friction and wear rate of the films. XRD analysis confirmed the presence of β-NiAl phase. EDAX revealed nearly equal atomic composition of Ni and Al at 300 W for Ni and 400 W for Al targets, respectively with the Ni-Al-N thin films showing a nickel rich NiAl phase. AFM indicated a smooth surface finish with surface roughness ≤ 100 nm. Nanoindentation for coatings on glass substrates displayed hardness and elastic modulus of 7.7 GPa and 100 GPa respectively. Hardest coatings obtained were at 10% of N content. Scratch test of coated samples gave critical load, friction of coefficient and wear rate of 24 N, 0.24 and 1×10⁻⁶ mm³/m respectively on steel.

Keywords: closed field magnetron sputtering; unbalanced magnetron sputtering; NiAl thin films; wear; mechanical properties; surface finish; surface roughness; nickel; aluminium; steel; nanoindentation; glass substrates; hardness; elastic modulus; nanotechnology.

DOI: 10.1504/IJNBM.2009.027714

International Journal of Nano and Biomaterials, 2009 Vol.2 No.1/2/3/4/5, pp.204 - 215

Published online: 08 Aug 2009 *

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