Title: Ultra-precision diamond turning of microstructure with FTS

Authors: Guang Yu, Yilong Wang, Qingliang Zhao, Yuanhua Yang, Meng Lu, Wei Zhang

Addresses: Center for Space Optics Engineering, School of Astronautics, Center for Precision Engineering, School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, 150001, P.R. China. ' Center for Precision Engineering, Harbin Institute of Technology, P.O. Box 413, No.92 Xi Da Zhi Street, Harbin, 150001, P.R. China. ' Center for Precision Engineering, Harbin Institute of Technology, Harbin, 150001, P.R. China. ' China Aerospace Science and Technology Corporation, Changzheng Machinery Plant Chengdu, 610100, P.R. China. ' China Airborne Missile Academy, Luoyang, 471000, P.R. China. ' Center for Space Optics Engineering, School of Astronautics, Harbin Institute of Technology, Harbin, 150001, P.R. China

Abstract: In order to fabricate optical microstructures at a high efficiency but low cost way, ultra-precision diamond machining technology with fast tool servo (FTS) was developed in this study and a typical sine-wave microstructure with a form accuracy of 0.65 μm and surface roughness of 45 nm was fabricated by this technology. Moreover, the effects of cutting conditions such as feed rate and spindle speed on surface quality were discussed, the experimental results suggested that better surface quality can be obtained when a higher spindle speed but a relatively lower feed rate were employed. In addition, the cutting experiments also showed that the surface machined with FTS was much better than that machined without FTS. At last, the tool wear behaviour in ultra-precision diamond machining of sine-wave microstructure was explored.

Keywords: ultra-precision machining; sine-wave microstructure; fast tool servo; FTS; tool wear; nanomanufacturing; diamond turning; form accuracy; surface roughness; feed rate; spindle speed; surface quality.

DOI: 10.1504/IJNM.2009.027504

International Journal of Nanomanufacturing, 2009 Vol.3 No.4, pp.297 - 311

Published online: 28 Jul 2009 *

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