Title: Development of novel integrated bio/chemical sensor systems using chalcogenide glass materials

Authors: Laeticia Petit, Nathan Carlie, Bodgan Zdyrko, Igor Luzinov, Kathleen Richardson, Juejun Hu, Anu Agarwal, Lionel Kimerling, Troy Anderson, Martin Richardson

Addresses: School of Materials Science and Engineering, Clemson University, 161 Sirrine Hall, Clemson SC 29634, USA. ' School of Materials Science and Engineering, Clemson University, 161 Sirrine Hall, Clemson SC 29634, USA. ' School of Materials Science and Engineering, Clemson University, 161 Sirrine Hall, Clemson SC 29634, USA. ' School of Materials Science and Engineering, Clemson University, 161 Sirrine Hall, Clemson SC 29634, USA. ' School of Materials Science and Engineering, Clemson University, 161 Sirrine Hall, Clemson SC 29634, USA. ' Micro-photonics Center, Massachusetts Institute of Technology, 77 Mass. Ave., Cambridge, MA 02139, USA. ' Micro-photonics Center, Massachusetts Institute of Technology, 77 Mass. Ave., Cambridge, MA 02139, USA. ' Micro-photonics Center, Massachusetts Institute of Technology, 77 Mass. Ave., Cambridge, MA 02139, USA. ' College of Optics and Photonics CREOL/FPCE, University of Central Florida, Orlando, 4000 Central Florida Boulevard, FL 32816, USA. ' College of Optics and Photonics CREOL/FPCE, University of Central Florida, Orlando, 4000 Central Florida Boulevard, FL 32816, USA

Abstract: This paper reviews ongoing progress in the design and fabrication of new, on-chip, low loss planar molecular sensors. We report the details of device design, material selection and manufacturing processes used to realise high-index-contrast (HIC), compact micro-disk resonators. These structures have been fabricated in thermally evaporated As- and Ge-based chalcogenide glass films with PDMS (polydimethylsiloxane) micro-fluidic channels using standard UV lithography. Discussed are findings that demonstrate that our novel chalcogenide-based micro-fluidic device can be used as highly sensitive refractive index sensors.

Keywords: chalcogenide glass; thin films; waveguide; refractive index sensors; compact micro-disk resonators; photonic integration; refractometry; absorption spectroscopy; microfluidics; lab-on-a-chip; molecular sensors; nanotechnology; biosensors; chemical sensors.

DOI: 10.1504/IJNT.2009.026741

International Journal of Nanotechnology, 2009 Vol.6 No.9, pp.799 - 815

Available online: 24 Jun 2009 *

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