Title: An overview of some key issues about micro/nano manufacturing

Authors: Ping Yang

Addresses: Laboratory of Advanced Design, Manufacturing and Reliability for MEMS/NEMS, School of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China

Abstract: An overview on some key issues for micro/nano manufacturing is reviewed in this paper. The research situations and development about some key problems for micro/nano manufacturing are discussed. It points that some tasks which are faced by the future research of micro/nano manufacturing technology are basic theoretical topics for design, new principles for manufacturing and new experimental technologies for testing, etc.

Keywords: micromanufacturing; nanomanufacturing; electronics manufacturing; key issues; overview; nanotechnology; nanoelectronics; microelectronics.

DOI: 10.1504/IJMSI.2008.022996

International Journal of Materials and Structural Integrity, 2008 Vol.2 No.4, pp.363 - 374

Published online: 06 Feb 2009 *

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