Article: Launching into a golden age: gears (mm parts) made by the deep X-ray LIG(A) process Journal: International Journal of Technology Transfer and Commercialisation (IJTTC) 2008 Vol.7 No.4 pp.362 - 370 Abstract: For the fabrication of highly precise mm parts, different processes could be chosen. The performance criteria of any process are multiple; quality (to deliver to the customer what they expect) and price belongs to them. The LIGA fabrication technique meets the first point and in a near future, the second one as well. Why choose the direct LIGA technique and which performance can be achieved using this process? To answer these questions, we present two studies: prototype fabrication and tests of 900 µm and 1400 &181;m thick direct Nickel/Cobalt (Ni/Co) LIG(A) gears made for a market leader in miniaturised micro powertrains, and the fabrication of 180 µm thick direct gold (Au) gear wheels. The quality of the finished parts will be addressed. Furthermore, by taking these two cases as examples, we will present a simulation of future production using a fully automated fabrication line (FELIG). Inderscience Publishers - linking academia, business and industry through research

Title: Launching into a golden age: gears (mm parts) made by the deep X-ray LIG(A) process

Authors: Pascal Meyer, Volker Saile, Joachim Schulz, Olaf Klein, Markus Arendt

Addresses: Institut fur Mikrostrukturtechnik (IMT), Universitat Karlsruhe and Forschungszentrum Karlsruhe, Karlsruhe D-76021 Germany. ' Institut fur Mikrostrukturtechnik (IMT), Universitat Karlsruhe and Forschungszentrum Karlsruhe, Karlsruhe D-76021 Germany. ' Institut fur Mikrostrukturtechnik (IMT), Universitat Karlsruhe and Forschungszentrum Karlsruhe, Karlsruhe D-76021 Germany. ' Maxon Motor GmbH Sexau, Untere Ziel 1, Sexau D-79350, Germany. ' SUSS MicroTec Lithography, Vaihingen-Enz, GmbH D-71665, Germany

Abstract: For the fabrication of highly precise mm parts, different processes could be chosen. The performance criteria of any process are multiple; quality (to deliver to the customer what they expect) and price belongs to them. The LIGA fabrication technique meets the first point and in a near future, the second one as well. Why choose the direct LIGA technique and which performance can be achieved using this process? To answer these questions, we present two studies: prototype fabrication and tests of 900 µm and 1400 &181;m thick direct Nickel/Cobalt (Ni/Co) LIG(A) gears made for a market leader in miniaturised micro powertrains, and the fabrication of 180 µm thick direct gold (Au) gear wheels. The quality of the finished parts will be addressed. Furthermore, by taking these two cases as examples, we will present a simulation of future production using a fully automated fabrication line (FELIG).

Keywords: deep X-ray lithography; quality; metrology; LIGA gears; reproducibility; production; micro powertrains; microengineering; micromanufacturing; gold gear wheels; simulation; automated fabrication.

DOI: 10.1504/IJTTC.2008.021034

International Journal of Technology Transfer and Commercialisation, 2008 Vol.7 No.4, pp.362 - 370

Published online: 31 Oct 2008 *

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Title: Launching into a golden age: gears (mm parts) made by the deep X-ray LIG(A) process

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