Title: Multi-material micro/nanomanufacturing at FEMTO-innovation

Authors: Chantal Khan Malek, Jean-Claude Jeannot, Michel Froelicher

Addresses: FEMTO-Innovation/FEMTO-ST, UMR CNRS 6174, 32 Av. de l'Observatoire, F-25044 Besancon, France. ' FEMTO-Innovation/FEMTO-ST, UMR CNRS 6174, 32 Av. de l'Observatoire, F-25044 Besancon, France. ' FEMTO-Innovation/CTMN, 39 Avenue de l'Observatoire, BP 1445, F-25007 Besancon Cedex 3, France

Abstract: FEMTO-ST is one of the premier French research institutes in the field of microsystems and micro /nanotechnology. It offers a wide range of competencies in engineering sciences, encompassing the whole spectrum from basic research (CNRS associated unit) to applied research and research partnership in association with a centre of technology transfer within the |FEMTO-Innovation| Carnot Institute. This paper contributes an overview concerning the array of technologies developed and exploited in the research and development of micro and nanoscale components and miniaturised systems. The technological platform specialises in a multi-material approach for multi-functional devices and supports the development of hybrid techniques of manufacture.

Keywords: micromanufacturing; multi-material approach; piezoelectric; lithium niobate; polymer; glass; nanotechnology; high aspect ratio; France; technology transfer; research; nanoscale components; microcomponents.

DOI: 10.1504/IJTTC.2008.020359

International Journal of Technology Transfer and Commercialisation, 2008 Vol.7 No.2/3, pp.209 - 219

Available online: 18 Sep 2008 *

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