Title: Commercialisation of LIGA: a 25-year retrospective

Authors: Volker Saile

Addresses: Institute of Microstructure Technology (IMT), Universitat Karlsruhe (TH) and Forschungszentrum Karlsruhe GmbH (FZK), D-76021 Karlsruhe, Germany

Abstract: The first publication on the LIGA technology is 25-years old. Since then, LIGA has been successfully used in many research projects. Also, components for industrial customers have been produced but on a rather limited scale only. In spite of its technical superiority, LIGA is still waiting for broad industrial implementation. The reasons for this reluctance in the private sector are not really cost, capabilities and potential, but rather complexity of the process sequence, turnaround times, overall yield and, finally, confidence.

Keywords: LIGA; direct-LIGA; lithography; X-ray lithography; commercialisation; ANKA; X-ray resist; mould.

DOI: 10.1504/IJTTC.2008.020357

International Journal of Technology Transfer and Commercialisation, 2008 Vol.7 No.2/3, pp.188 - 193

Published online: 18 Sep 2008 *

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