Authors: Volker Saile
Addresses: Institute of Microstructure Technology (IMT), Universitat Karlsruhe (TH) and Forschungszentrum Karlsruhe GmbH (FZK), D-76021 Karlsruhe, Germany
Abstract: The first publication on the LIGA technology is 25-years old. Since then, LIGA has been successfully used in many research projects. Also, components for industrial customers have been produced but on a rather limited scale only. In spite of its technical superiority, LIGA is still waiting for broad industrial implementation. The reasons for this reluctance in the private sector are not really cost, capabilities and potential, but rather complexity of the process sequence, turnaround times, overall yield and, finally, confidence.
Keywords: LIGA; direct-LIGA; lithography; X-ray lithography; commercialisation; ANKA; X-ray resist; mould.
International Journal of Technology Transfer and Commercialisation, 2008 Vol.7 No.2/3, pp.188 - 193
Available online: 18 Sep 2008 *Full-text access for editors Access for subscribers Purchase this article Comment on this article