Title: Growth of Carbon Nanotubes via Rapid Thermal Processing from sputtered amorphous carbon

Authors: Soon-Eng Ong, Sam Zhang, Jang-Hsing Hsieh, Hejun Du, Shiu-Hann Oh

Addresses: School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798 Singapore. ' School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798 Singapore. ' Department of Materials Engineering, Mingchi University of Technology, 84 Gungjuan Road, Taishan, Taipei 243, Taiwan. ' School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798 Singapore. ' School of Mechanical and Aerospace Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798 Singapore

Abstract: Carbon Nanotubes (CNT) were grown from amorphous carbon film when the top catalyst layer can agglomerate into nanoparticles during rapid thermal processing. The CNT grown with Co are longer and exhibit alignment at the perimeter of the substrate, while those grown with Au are straighter and denser. One large catalyst particle can support multiple CNT growth, and the effect is more pronounced with Au nanoparticles. Introduction of ethanol vapour during the thermal process increases the yield of the CNT grown with both catalysts.

Keywords: amorphous carbon film; cobalt; gold; rapid thermal processing; RTP; carbon nanotubes; CNTs; nanoparticles; nanomanufacturing; nanotechnology; ethanol vapour.

DOI: 10.1504/IJNM.2008.017837

International Journal of Nanomanufacturing, 2008 Vol.2 No.1/2, pp.40 - 49

Published online: 19 Apr 2008 *

Full-text access for editors Full-text access for subscribers Purchase this article Comment on this article