Title: Research on hydrodynamic suspension nanoscale polishing for K9 optical glass

Authors: J. Zhao, Z.Q. Cao, J.M. Zhan, F. Zhang, L. Niu

Addresses: College of Mechanical Science and Engineering, Jilin University, Changchun, China. ' College of Mechanical Science and Engineering, Jilin University, Changchun, China. ' College of Mechanical and Electronical Engineering, Ningbo University, Ningbo, China. ' College of Mechanical Science and Engineering, Jilin University, Changchun, China. ' College of Mechanical Science and Engineering, Jilin University, Changchun, China

Abstract: In this paper, a hydrodynamic suspension nanoscale polishing system based on Computer Numerical Control (CNC) is established. A new type of compliant polishing tool system is developed, which can realise nanoscale displacement compensating. Also polishing experiments on K9 optical glass, using the polishing fluid mixed with nanoscale SiC abrasive particles, have been conducted to investigate the fundamental machining mechanism. A high-quality surface without crystallite dislocation and micro cracks is achieved. It is shown that the removal of atomic layers size can be done by colliding nanoscale abrasive particles with the workpiece surface.

Keywords: elastohydrodynamics; hydrodynamic suspension; nanoscale displacement compensation; ultra-precision polishing; optical glass polishing; surface finishing; CNC polishing; silicon carbide; surface quality; nanoscale abrasive particles.

DOI: 10.1504/IJCAT.2007.015276

International Journal of Computer Applications in Technology, 2007 Vol.29 No.2/3/4, pp.257 - 261

Published online: 30 Sep 2007 *

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