Title: Motion simulation of annular polishing

Authors: Quantang Fan, Jianqiang Zhu, Baoan Zhang, Lei Bao

Addresses: Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ' Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ' Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. ' Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

Abstract: Based on the Coulomb friction model, the frictional motion model of workpiece relating to the polishing pad was presented in annular polishing. By the dynamic analysis software, the model was simulated and analysed. The conclusions from the results were that the workpiece did not rotate steadily. When the angular velocity of ring and the direction were the same as that of the polishing pad, the angular velocity of workpiece hoicked at the beginning and at the later stage were the same as that of the polishing pad before contacting with the ring. The angular velocity of workpiece vibrated at the moment of contacting with the ring. After that the angular velocity of workpiece increased gradually and fluctuated at a given value, while the angular velocity of ring decreased gradually and also fluctuated at a given value. Since the contact between the workpiece and the ring was linear, their linear velocities and directions should be the same. But the angular velocity of workpiece was larger than that of the polishing pad on the condition that the radius of the workpiece was less than that of the ring. This did not agree with the pure translation principle and the workpiece surface could not be flat, either. Consequently, it needed to be controlled with the angular velocity of ring and the radii of the ring and the workpiece, besides friction to make the angular velocity of workpiece equal to that of the polishing pad for obtaining fine surface flatness of the workpiece.

Keywords: angular velocity; Coulomb friction; annular polishing; motion simulation; modelling; workpiece rotation; polishing pad; surface flatness.

DOI: 10.1504/IJCAT.2007.015254

International Journal of Computer Applications in Technology, 2007 Vol.29 No.2/3/4, pp.159 - 162

Published online: 30 Sep 2007 *

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