Title: Investigation of fabrication parameters effect on the 1-3 piezoelectric ceramics composite performance

Authors: Yang Zhou; Yao Liu; Jinjie Zhou; Bin Shen; Zhanling Guo

Addresses: North University of China, Taiyuan – 030051, China ' North University of China, Taiyuan – 030051, China ' North University of China, Taiyuan – 030051, China ' Yangtze Delta Region Institute of Tsinghua University, Zhejiang, Jiaxing – 314001, China ' Yangtze Delta Region Institute of Tsinghua University, Zhejiang, Jiaxing – 314001, China

Abstract: Dicing and filling is the most commonly used method to fabricate the piezoelectric composite by removing parts of the piezoelectric ceramics and filling with polymer. However, the effect of fabrication parameters, including the dicing and structure, on the piezoelectric composite performance is not clear. In this study, the fabrication parameters of 1-3 piezoelectric composite have been investigated and the electrical properties of 1-3 type piezoelectric composites have been measured to reveal the influence. The results show that as the wheel speed increases and the feed rate decreases, the dicing kerf width and performance consistency improve. The higher the ceramic volume fraction in piezoelectric composite, the larger of resonant and anti-resonant frequency, dielectric properties, mechanical quality factor, acoustic impedance, and thickness electromechanical coupling coefficient are. This study gives a fundamental understanding of piezoelectric composite performance from the fabrication side.

Keywords: piezoelectric ceramics; PZT-4; dicing; surface roughness; volume fraction.

DOI: 10.1504/IJAT.2024.140958

International Journal of Abrasive Technology, 2024 Vol.12 No.3, pp.221 - 235

Received: 11 Jul 2023
Accepted: 18 Apr 2024
Published online: 04 Sep 2024 *

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