Title: Planar nanostructures element analysis using the X-ray radiation emission induced by high energy excitation

Authors: E.V. Egorov; V.K. Egorov; M.S. Afanas'ev

Addresses: X-ray Acusto-Optics Lab., Institute of Microelectronics Technology Russian Academy of Science, Chernogolovka, Street, Academica Osip'yana, 6, Moscow District, 142432, Russia; Department of Security Information, Financial University under the Government of the Russian Federation, Russia and Institute of Radio Engineering and Electronics, Russian Academy of Science, Moscow, 125167, Russia ' X-ray Acusto-Optics Lab., Institute of Microelectronics Technology Russian Academy of Science, Chernogolovka, Street Academica Osip'yana, 6, Moscow District, 142432, Russia ' Institute of Radio Engineering and Electronics, Russian Academy of Science, Fryazino, Moscow District, 141190, Russia

Abstract: The work presents a short comparative description of high energy methods applied for characteristical X-ray radiation emission excitation including fluxes of X-ray hard radiation and beams of high energy ions and electrons oriented on the element analysis of planar nanostructures. The paper discusses the analysis possibilities executed in conditions of the hard X-ray exciting fluxes total external reflection on studied surface (TXRF) and in frame of proton (particle) induced X-ray emission (PIXE) and electron microprobe methods modified by including into its spectrometric schemes planar X-ray waveguide-resonators. Experimental data confirming high efficiency of these methods for planar nanostructures surface element diagnostics are presented.

Keywords: TXRF; total external reflection on studied surface; waveguide-resonator; PIXE; proton (particle) induced X-ray emission; RBS; Rutherford backscattering spectrometry; element diagnostic; X-ray; electron beam; microprobe.

DOI: 10.1504/IJNT.2024.136509

International Journal of Nanotechnology, 2024 Vol.21 No.1/2, pp.26 - 37

Published online: 05 Feb 2024 *

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